From rik at snf.stanford.edu Thu Dec 3 00:57:25 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 3 Dec 2009 00:57:25 -0800 Subject: Problem thermcopoly1 SNF 2009-12-03 00:57:24: Recipe halted in between dep Message-ID: Boat started to try to pull out with 15 mins left in the dep (2 hour 16 min dep). Pressure went up to 690mTorr from 240mTorr and the BOAT STA error came up. I aborted the program and used POLYOUT to get tube out. The boat motor was continuously running the whole time trying to pull the boat out! The boat started coming out while POLYOUT program still had 10 mins left to run. I did a boat calibration once the tube was out and tried to run a short dep again. The dep ran fine. I had run the boat calibration program before my first dep as well, so am not sure why it messed up in between the deposition. From mdickey at snf.stanford.edu Mon Dec 7 07:42:01 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 7 Dec 2009 07:42:01 -0800 Subject: Comment thermcopoly1 SNF 2009-12-07 07:42:00: Oil Message-ID: Added oil to the pump From tberg at snf.stanford.edu Tue Dec 8 06:01:49 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Dec 2009 06:01:49 -0800 Subject: Comment thermcopoly1 SNF 2009-11-11 22:49:06: Performed boat cal Message-ID: noted From tberg at snf.stanford.edu Tue Dec 8 06:02:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Dec 2009 06:02:03 -0800 Subject: Comment thermcopoly1 SNF 2009-11-16 08:15:38: Oil added Message-ID: noted From tberg at snf.stanford.edu Tue Dec 8 06:02:14 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Dec 2009 06:02:14 -0800 Subject: Comment thermcopoly1 SNF 2009-11-24 07:31:33: Oil added Message-ID: noted From tberg at snf.stanford.edu Tue Dec 8 06:02:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Dec 2009 06:02:30 -0800 Subject: Comment thermcopoly1 SNF 2009-11-11 16:27:34: Ran boat cal Message-ID: noted From tberg at snf.stanford.edu Tue Dec 8 06:03:27 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Dec 2009 06:03:27 -0800 Subject: Problem thermcopoly1 SNF 2009-12-03 00:57:24: Recipe halted in between dep Message-ID: Did boat cal Ok Several runs since no problem From pnataraj at snf.stanford.edu Thu Dec 10 21:22:52 2009 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Thu, 10 Dec 2009 21:22:52 -0800 Subject: Problem thermcopoly1 SNF 2009-12-10 21:22:51: leak fail Message-ID: The boat went wacky!! It started coming in and out on its own. I ran boat cal and tried my prog, it failed leak check. From tberg at snf.stanford.edu Fri Dec 11 06:38:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Dec 2009 06:38:16 -0800 Subject: Problem thermcopoly1 SNF 2009-12-10 21:22:51: leak fail Message-ID: did boat cal and ran stbypoly no problem leak check was fine From rshyam at snf.stanford.edu Mon Dec 14 04:56:54 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 14 Dec 2009 04:56:54 -0800 Subject: Problem thermcopoly1 SNF 2009-12-14 04:56:54: Wafer boat broken Message-ID: One of the wafer boats cracked and broke From tberg at snf.stanford.edu Tue Dec 15 06:59:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Dec 2009 06:59:43 -0800 Subject: Problem thermcopoly1 SNF 2009-12-14 04:56:54: Wafer boat broken Message-ID: replaced 6" boat From tberg at snf.stanford.edu Tue Dec 22 08:15:14 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Dec 2009 08:15:14 -0800 Subject: Shutdown thermcopoly1 SNF 2009-12-22 08:15:14: pump out for rebuild Message-ID: