Problem thermcopoly1 SNF 2009-12-14 04:56:54: Wafer boat broken
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Tue Dec 15 06:59:43 PST 2009
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Problem thermcopoly1 SNF 2009-12-14 04:56:54: Wafer boat broken
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Shutdown thermcopoly1 SNF 2009-12-22 08:15:14: pump out for rebuild
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replaced 6" boat
Previous message:
Problem thermcopoly1 SNF 2009-12-14 04:56:54: Wafer boat broken
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Shutdown thermcopoly1 SNF 2009-12-22 08:15:14: pump out for rebuild
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