From riteshj at snf.stanford.edu Fri Feb 6 18:16:56 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Fri, 6 Feb 2009 18:16:56 -0800 Subject: Problem thermcopoly1 SNF 2009-02-06 18:16:56: boat stall error (boat doesnt go in fully) Message-ID: The boat does not go in fully, Reloaded the program twice but still doesnt go in. boat always stalls ! From tberg at snf.stanford.edu Mon Feb 9 07:31:07 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Feb 2009 07:31:07 -0800 Subject: Problem thermcopoly1 SNF 2009-02-06 18:16:56: boat stall error (boat doesnt go in fully) Message-ID: did boat cal ,ran stbypoly no problem From ajamo at snf.stanford.edu Fri Feb 13 01:09:11 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 13 Feb 2009 01:09:11 -0800 Subject: Problem thermcopoly1 SNF 2009-02-13 01:09:10: process pressure .441 & non uniform run Message-ID: Used recipe P525POLY for 1 hr and 8 min. target thk is 1000 A poly on 1000 Oxide. Wafers in front boat behind 2 dummies (tight pack) came out ave 750A poly and wafers in back boat came out 950A poly. Base pressure good 13mtorr, Leak 63 mtorr, dep pressure 441mtorr from back panel . The rest of the logbook dep pressure was ~200mtorr. From maurice at snf.stanford.edu Fri Feb 13 11:20:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Feb 2009 11:20:47 -0800 Subject: Problem thermcopoly1 SNF 2009-02-13 11:20:46: another broken vacuum wand tip Message-ID: what are they doing? From maurice at snf.stanford.edu Wed Feb 18 10:01:26 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Feb 2009 10:01:26 -0800 Subject: Problem thermcopoly1 SNF 2009-02-13 01:09:10: process pressure .441 & non uniform run Message-ID: Process pressure for this recipe is set to 400mtorr...so pressure looks normal. We will check boat position. User will check with their customer to see if previous runs have come out the same way. From pnataraj at snf.stanford.edu Wed Feb 25 16:55:43 2009 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Wed, 25 Feb 2009 16:55:43 -0800 Subject: Problem thermcopoly1 SNF 2009-02-25 16:55:43: failed leak check! Message-ID: Failed leak check twice, now has boat stall error From tberg at snf.stanford.edu Thu Feb 26 06:58:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 Feb 2009 06:58:43 -0800 Subject: Problem thermcopoly1 SNF 2009-02-25 16:55:43: failed leak check! Message-ID: Did boat cal ran stbypoly no problem From tberg at snf.stanford.edu Thu Feb 26 06:58:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 Feb 2009 06:58:53 -0800 Subject: Problem thermcopoly1 SNF 2009-02-13 11:20:46: another broken vacuum wand tip Message-ID: Replaced