Problem thermcopoly1 SNF 2009-02-13 01:09:10: process pressure .441 & non uniform run

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Feb 18 10:01:26 PST 2009


Process pressure for this recipe is set to 400mtorr...so pressure looks normal.  We will check boat position.
User will check with their customer to see if previous runs have come out the same way.




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