From king at snf.stanford.edu Fri Mar 6 04:14:31 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 6 Mar 2009 04:14:31 -0800 Subject: Problem thermcopoly1 SNF 2009-03-06 04:14:31: low dep rate, low sheet res Message-ID: Running P580PH3 gave bad results. Should get 800A and 150 ohm/sq. Got 650A and 300 ohm/sq. Added another layer but sheet res is still 250 oh,/sq. Verified Prometrix accuracy. Unusable results. From maurice at snf.stanford.edu Tue Mar 10 14:16:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 10 Mar 2009 14:16:42 -0700 Subject: Comment thermcopoly1 SNF 2009-03-10 14:16:42: running an undoped test Message-ID: P580poly 00:45:00 From maurice at snf.stanford.edu Thu Mar 12 10:30:45 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Mar 2009 10:30:45 -0700 Subject: Comment thermcopoly1 SNF 2009-03-10 14:16:42: running an undoped test Message-ID: Ran P580poly 00:45:00 2203 Ang Previous runs of the same recipe gave 09/07/07 2227ang 10/10/07 2304 05/30/08 2287 01/08/09 2025 03/10/09 2203 From maurice at snf.stanford.edu Thu Mar 12 10:37:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Mar 2009 10:37:24 -0700 Subject: Problem thermcopoly1 SNF 2009-03-06 04:14:31: low dep rate, low sheet res Message-ID: King reports: Whatever doping ailment the poly tube had seems to have gone away. I ran six 1000A SiO2 wafers with P580PH3 at 8sccm PH3 for 72 min and annealed in Thermco1, "1ANNEAL" 15 min 900C N2. Three sets of two oxide wafers were loaded in the Thermcopoly1 per the attached photo with no add'l spacing between wafers. (Note that Maurice moved the boats toward the back in the previous run, so now the front boat is situated where I've been loading my wafers, relative to the rail and ink marks on the external housing). 1) Back of back boat Dummy 12LT 910A, 107 ohm/sq 13LT 909A , 108 " 2) Front of back boat Dummy 14LT 880A, 119 ohm/sq 15LT 864A, 125 " 3) Front third of front boat Dummy 16LT 843A, 165 ohm/sq 17LT 843A, 177 " The front group is typical of what we've generally seen. We still see a significant doping shift along the load from the front to the center that I don't think is accounted for by the small change in thickness (Rohit or Ed could you please verify?) From maurice at snf.stanford.edu Thu Mar 12 10:38:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Mar 2009 10:38:23 -0700 Subject: Problem thermcopoly1 SNF 2009-03-12 10:38:22: B2H6 offline Message-ID: From king at snf.stanford.edu Thu Mar 12 18:54:17 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 12 Mar 2009 18:54:17 -0700 Subject: Problem thermcopoly1 SNF 2009-03-12 18:54:16: Monitor problem Message-ID: A plastic frame has fallen off behind the window, making it hard to read some of the screen. From king at snf.stanford.edu Thu Mar 12 19:19:07 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 12 Mar 2009 19:19:07 -0700 Subject: Comment thermcopoly1 SNF 2009-03-12 19:19:07: the circular polarizing filter Message-ID: is what has come off. From tberg at snf.stanford.edu Thu Mar 19 07:22:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Mar 2009 07:22:16 -0700 Subject: Problem thermcopoly1 SNF 2009-03-12 18:54:16: Monitor problem Message-ID: Restuck filter to monitor From tberg at snf.stanford.edu Thu Mar 19 07:22:57 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Mar 2009 07:22:57 -0700 Subject: Comment thermcopoly1 SNF 2009-03-12 19:19:07: the circular polarizing filter Message-ID: Restuck filter to monitor From maurice at snf.stanford.edu Fri Mar 20 15:31:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 Mar 2009 15:31:11 -0700 Subject: Shutdown thermcopoly1 SNF 2009-03-20 15:31:10: boat not closing Message-ID: Vacuumed wafer chips from boat track (I don't know who brohe the wafer). Tried 4 times to run the boat cal but it stops about a foot from the mouth of the tube when closing. Tube is pumped down and in standby. From tberg at snf.stanford.edu Mon Mar 23 07:17:46 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Mar 2009 07:17:46 -0700 Subject: Shutdown thermcopoly1 SNF 2009-03-20 15:31:10: boat not closing Message-ID: Did boat cal and ran standbypoly no problem From rshyam at snf.stanford.edu Sat Mar 28 19:39:32 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 28 Mar 2009 19:39:32 -0700 Subject: Problem thermcopoly1 SNF 2009-03-28 19:39:32: Boat repeated stalling Message-ID: tried many times - stopping about an inch or two from the tube From tberg at snf.stanford.edu Mon Mar 30 06:32:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Mar 2009 06:32:18 -0700 Subject: Problem thermcopoly1 SNF 2009-03-28 19:39:32: Boat repeated stalling Message-ID: did boat cal and ran stbypoly no problem