Problem thermcopoly1 SNF 2009-03-06 04:14:31: low dep rate, low sheet res

king at snf.stanford.edu king at snf.stanford.edu
Fri Mar 6 04:14:31 PST 2009


Running P580PH3 gave bad results.  
Should get 800A and 150 ohm/sq.
Got 650A and 300 ohm/sq.  
Added another layer but sheet res is still 250 oh,/sq.
Verified Prometrix accuracy.
Unusable results. 




More information about the thermcopoly1-pcs mailing list