From alsune at snf.stanford.edu Fri Apr 9 12:17:13 2010 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 9 Apr 2010 12:17:13 -0700 Subject: Problem thermcopoly1 SNF 2010-04-09 12:17:12: Vacuum Wand missing Message-ID: the quartz part of the wand is missing. From tberg at snf.stanford.edu Fri Apr 9 12:52:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Apr 2010 12:52:02 -0700 Subject: Problem thermcopoly1 SNF 2010-04-09 12:17:12: Vacuum Wand missing Message-ID: Replaced vacuum wand From rik at snf.stanford.edu Thu Apr 15 15:01:28 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 15 Apr 2010 15:01:28 -0700 Subject: Problem thermcopoly1 SNF 2010-04-15 15:01:27: Found tube in BOAT STALL state Message-ID: Trying POLYOUT and BOATCAL ... wish me luck From rik at snf.stanford.edu Thu Apr 15 15:32:10 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 15 Apr 2010 15:32:10 -0700 Subject: Problem thermcopoly1 SNF 2010-04-15 15:32:09: boat cal failed Message-ID: manually sent the boat in and started the standby recipe. the stby recipe seems to be working right now, but not having much luck with normal recipes. From rik at snf.stanford.edu Thu Apr 15 16:55:00 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 15 Apr 2010 16:55:00 -0700 Subject: Problem thermcopoly1 SNF 2010-04-15 16:54:59: Boat calibration off Message-ID: Just a guess but it seems like the sensor for detecting when the boat has reached the maximum out position is failing, as the motor keeps trying to pull the boat out despite reaching max range. All the recipes (including BOATCAL) get stuck at this point. Manually sending the boat back in seems to override the system that tries to pull the boat out (based on motor sound). Managed to use this trick to successfully run the STBYPOLY recipe. Currently trying a deposition (again using the same trick). Base pressure is at 13mTorr as expected, and leak pressure at 30mTorr. Currently the motor is not trying to pull the tube out. Not shutting the system down for now as the recipe is working out for me, but I'm guessing most users wouldn't want to follow my insanity ... From rik at snf.stanford.edu Fri Apr 16 08:28:00 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 16 Apr 2010 08:28:00 -0700 Subject: Comment thermcopoly1 SNF 2010-04-16 08:27:59: Worked for next user Message-ID: I stuck around after my dep to help the next user in case he faced the same problem I did. The tube went back in without a problem for him. 3possibilities: 1) The tube hates me [probably], 2) The tube loves him [maybe], 3) The problem is intermittent [likely]. Please take a look at the boat cal when you get a chance. Thanks. From pcristman at snf.stanford.edu Sat Apr 17 07:37:30 2010 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Sat, 17 Apr 2010 07:37:30 -0700 Subject: Comment thermcopoly1 SNF 2010-04-17 07:37:29: Remember to check boat in Message-ID: Did not fully boat in on first run. Needed to push final bit in manually. Remember from training to check that the boat is fully in. From tberg at snf.stanford.edu Mon Apr 19 07:19:00 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Apr 2010 07:19:00 -0700 Subject: Problem thermcopoly1 SNF 2010-04-15 15:01:27: Found tube in BOAT STALL state Message-ID: Did boat cal and ran STBYPOLY no problem From tberg at snf.stanford.edu Mon Apr 19 07:19:25 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Apr 2010 07:19:25 -0700 Subject: Problem thermcopoly1 SNF 2010-04-15 15:32:09: boat cal failed Message-ID: Did boat cal and ran STBYPOLY no problem From tberg at snf.stanford.edu Mon Apr 19 07:19:40 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Apr 2010 07:19:40 -0700 Subject: Problem thermcopoly1 SNF 2010-04-15 16:54:59: Boat calibration off Message-ID: Did boat cal and ran STBYPOLY no problem From tberg at snf.stanford.edu Mon Apr 19 07:19:51 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Apr 2010 07:19:51 -0700 Subject: Comment thermcopoly1 SNF 2010-04-16 08:27:59: Worked for next user Message-ID: noted From tberg at snf.stanford.edu Mon Apr 19 07:20:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Apr 2010 07:20:02 -0700 Subject: Comment thermcopoly1 SNF 2010-04-17 07:37:29: Remember to check boat in Message-ID: Did boat cal and ran STBYPOLY no problem From ksaruta at snf.stanford.edu Mon Apr 19 14:22:59 2010 From: ksaruta at snf.stanford.edu (ksaruta at snf.stanford.edu) Date: Mon, 19 Apr 2010 14:22:59 -0700 Subject: Problem thermcopoly1 SNF 2010-04-19 14:22:58: leakfail Message-ID: deposition process was failed due to leak error. Probably the pump doesn't work. From tberg at snf.stanford.edu Tue Apr 20 06:44:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Apr 2010 06:44:38 -0700 Subject: Shutdown thermcopoly1 SNF 2010-04-20 06:44:37: Broken TC sheath Message-ID: From tberg at snf.stanford.edu Tue Apr 20 09:37:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Apr 2010 09:37:14 -0700 Subject: Problem thermcopoly1 SNF 2010-04-19 14:22:58: leakfail Message-ID: Replaced TC sheath and did boat cal. Ran standby Poly no prob. Back at temp. From tberg at snf.stanford.edu Tue Apr 20 09:37:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Apr 2010 09:37:23 -0700 Subject: Shutdown thermcopoly1 SNF 2010-04-20 06:44:37: Broken TC sheath Message-ID: Replaced TC sheath and did boat cal. Ran standby Poly no prob. Back at temp. From maurice at snf.stanford.edu Tue Apr 20 12:20:41 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Apr 2010 12:20:41 -0700 Subject: Comment thermcopoly1 SNF 2010-04-20 12:20:40: Test after Injector replaced Message-ID: Ran P580POLY 00:22:30 expected ~900 ang actually 980Ang From liangjl at snf.stanford.edu Thu Apr 22 02:31:26 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Thu, 22 Apr 2010 02:31:26 -0700 Subject: Comment thermcopoly1 SNF 2010-04-22 02:31:25: leakfail Message-ID: leak check fail twice, cannot fix it with POLYOUT From liangjl at snf.stanford.edu Thu Apr 22 02:33:21 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Thu, 22 Apr 2010 02:33:21 -0700 Subject: Problem thermcopoly1 SNF 2010-04-22 02:33:21: leakfail Message-ID: leakfail twice. POLYOUT didn't help. From tberg at snf.stanford.edu Thu Apr 22 07:35:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Apr 2010 07:35:02 -0700 Subject: Problem thermcopoly1 SNF 2010-04-22 02:33:21: leakfail Message-ID: Ran boat cal and STBYPOLY no problem leak rate fine. From tberg at snf.stanford.edu Thu Apr 22 07:35:10 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Apr 2010 07:35:10 -0700 Subject: Comment thermcopoly1 SNF 2010-04-22 02:31:25: leakfail Message-ID: Ran boat cal and STBYPOLY no problem leak rate fine. From narii at snf.stanford.edu Sun Apr 25 21:16:32 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 25 Apr 2010 21:16:32 -0700 Subject: Problem thermcopoly1 SNF 2010-04-25 21:16:31: Cannot push in the tube Message-ID: Unable to push in tube completely. At first, tube goes in, but as soon as it enters polypump phase, tube comes halfway out. It is impossible to pump down the tube. From narii at snf.stanford.edu Sun Apr 25 21:39:29 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 25 Apr 2010 21:39:29 -0700 Subject: Problem thermcopoly1 SNF 2010-04-25 21:39:29: Another problem Message-ID: After I pulled out the tube to unload my wafers, the tube won't go in at all this time. It generated scratching sound during pulling out phase, and now there is noise from motor. Tried to run stbypoly a couple of times, but tube won't move at all From wslee at snf.stanford.edu Mon Apr 26 11:50:56 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 26 Apr 2010 11:50:56 -0700 Subject: Problem thermcopoly1 SNF 2010-04-26 11:50:54: Boat In Problem - Unable to run deposition Message-ID: When I attempted to run my recipe, the wafers boated in but the motor started making noise. The DOOR SW alarm came on the screen and it went to a BOATSTAB step. After this step, the wafers boated out. I repeated 2 more times to try and eliliminate the DOOR SW alarm but it did not work. Tried to run stdbypoly but it will not leave boat in step and the motor is still making noise. From tberg at snf.stanford.edu Mon Apr 26 12:42:43 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Apr 2010 12:42:43 -0700 Subject: Shutdown thermcopoly1 SNF 2010-04-26 12:42:43: loader issue Message-ID: From tberg at snf.stanford.edu Tue Apr 27 08:09:47 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:09:47 -0700 Subject: Shutdown thermcopoly1 SNF 2010-04-26 12:42:43: loader issue Message-ID: Did boat cal and reset boat positions. Will keep under observation From tberg at snf.stanford.edu Tue Apr 27 08:10:42 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:10:42 -0700 Subject: Problem thermcopoly1 SNF 2010-04-26 11:50:54: Boat In Problem - Unable to run deposition Message-ID: Did boat cal and reset boat positions. Will keep under observation From tberg at snf.stanford.edu Tue Apr 27 08:11:04 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:11:04 -0700 Subject: Problem thermcopoly1 SNF 2010-04-25 21:16:31: Cannot push in the tube Message-ID: Did boat cal and reset boat positions. Will keep under observation From tberg at snf.stanford.edu Tue Apr 27 08:11:12 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:11:12 -0700 Subject: Problem thermcopoly1 SNF 2010-04-25 21:39:29: Another problem Message-ID: Did boat cal and reset boat positions. Will keep under observation From tberg at snf.stanford.edu Tue Apr 27 08:11:46 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:11:46 -0700 Subject: Problem thermcopoly1 SNF 2010-04-27 08:11:45: Observation Message-ID: From wslee at snf.stanford.edu Tue Apr 27 15:33:45 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:33:45 -0700 Subject: Problem thermcopoly1 SNF 2010-04-27 15:33:44: Continued boat in problems Message-ID: Boat in required Ted's help to make it work. While starting POLYCOAT, it boated in but the motor kept trying to push it in. Using Ted's trick (hold down enable and press boat out for a second), the motor stopped and the tube pumped down. From liangjl at snf.stanford.edu Thu Apr 29 13:35:26 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Thu, 29 Apr 2010 13:35:26 -0700 Subject: Comment thermcopoly1 SNF 2010-04-29 13:35:25: same problem Message-ID: with the help of maurice, have to use the "enable+boat out" trick to make the furnace work. From maurice at stanford.edu Thu Apr 29 15:44:00 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 29 Apr 2010 15:44:00 -0700 Subject: Comment thermcopoly1 SNF 2010-04-29 13:35:25: same problem In-Reply-To: <20100429203526.94992CDDB@smtp.stanford.edu> References: <20100429203526.94992CDDB@smtp.stanford.edu> Message-ID: <4BDA0BB0.9000802@stanford.edu> You are now an expert! -m liangjl at snf.stanford.edu wrote: > with the help of maurice, have to use the "enable+boat out" trick to make the furnace work. > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278