Problem thermcopoly1 SNF 2010-04-25 21:39:29: Another problem

narii at narii at
Sun Apr 25 21:39:29 PDT 2010

After I pulled out the tube to unload my wafers, the tube won't go in at all this time. It generated scratching sound during pulling out phase, and now there is noise from motor.
Tried to run stbypoly a couple of times, but tube won't move at all

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