From bchui at snf.stanford.edu Sat Dec 4 12:57:12 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 4 Dec 2010 12:57:12 -0800 Subject: Problem thermcopoly1 SNF 2010-12-04 12:57:12: Boat calibration off Message-ID: Boat stops short of pulling all the way in. I had to give it a nudge to fully close it and allow pumpdown to proceed successfully. From dongrip at snf.stanford.edu Sun Dec 5 00:03:15 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 5 Dec 2010 00:03:15 -0800 Subject: Problem thermcopoly1 SNF 2010-12-05 00:03:14: leak fail Message-ID: attempted to do a run, but leak failed. From dongrip at snf.stanford.edu Sun Dec 5 00:13:51 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 5 Dec 2010 00:13:51 -0800 Subject: Problem thermcopoly1 SNF 2010-12-05 00:13:50: left the chamber in stby mode Message-ID: attempted the runs twice, but kept leak fail... From maurice at snf.stanford.edu Sun Dec 5 17:34:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 17:34:00 -0800 Subject: Problem thermcopoly1 SNF 2010-12-04 12:57:12: Boat calibration off Message-ID: ran boat cal From maurice at snf.stanford.edu Sun Dec 5 17:42:03 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 17:42:03 -0800 Subject: Problem thermcopoly1 SNF 2010-12-05 00:13:50: left the chamber in stby mode Message-ID: ran boat cal passed leakcheck now in standby From maurice at snf.stanford.edu Sun Dec 5 17:42:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 5 Dec 2010 17:42:11 -0800 Subject: Problem thermcopoly1 SNF 2010-12-05 00:03:14: leak fail Message-ID: ran boat cal passed leakcheck now in standby From zpatel at snf.stanford.edu Tue Dec 7 11:17:20 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 7 Dec 2010 11:17:20 -0800 Subject: Problem thermcopoly1 SNF 2010-12-07 11:17:20: MF profile open Message-ID: position 3 show a profile value of 1420 From maurice at snf.stanford.edu Tue Dec 7 15:18:32 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Dec 2010 15:18:32 -0800 Subject: Shutdown thermcopoly1 SNF 2010-12-07 15:18:32: Poly tube broken Message-ID: While thermcopoly was in TempStab step of Polycoat recipe, Zubin amd I heared a loud sound from the tube. It sounded like a door slam. After letting the system purge for ~10 min I opened the tube and saw the back of the tube broken and was broken in half. I shut off the element breaker. From tberg at snf.stanford.edu Thu Dec 9 13:39:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Dec 2010 13:39:52 -0800 Subject: Comment thermcopoly1 SNF 2010-12-09 13:39:52: Tube back together Message-ID: Tube is back together, leak checked and heating up. It will need a coat and test once it reaches temp From tberg at snf.stanford.edu Thu Dec 9 13:40:37 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Dec 2010 13:40:37 -0800 Subject: Problem thermcopoly1 SNF 2010-12-07 11:17:20: MF profile open Message-ID: TC replaced From tberg at snf.stanford.edu Thu Dec 9 14:12:01 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Dec 2010 14:12:01 -0800 Subject: Comment thermcopoly1 SNF 2010-12-09 14:12:00: Running Coat at this time. Message-ID: Running Coat at this time. From maurice at snf.stanford.edu Fri Dec 10 09:34:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 09:34:35 -0800 Subject: Comment thermcopoly1 SNF 2010-12-10 09:34:35: testing Message-ID: From maurice at snf.stanford.edu Fri Dec 10 14:01:27 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 14:01:27 -0800 Subject: Comment thermcopoly1 SNF 2010-12-10 09:34:35: testing Message-ID: Ran P580poly Expected~900 ang Actual 847 From maurice at snf.stanford.edu Fri Dec 10 14:01:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 14:01:40 -0800 Subject: Comment thermcopoly1 SNF 2010-12-09 14:12:00: Running Coat at this time. Message-ID: coat complete From maurice at snf.stanford.edu Fri Dec 10 14:02:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 14:02:11 -0800 Subject: Comment thermcopoly1 SNF 2010-12-09 13:39:52: Tube back together Message-ID: coat and test complete From maurice at snf.stanford.edu Fri Dec 10 14:06:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 14:06:26 -0800 Subject: Shutdown thermcopoly1 SNF 2010-12-07 15:18:32: Poly tube broken Message-ID: Tube, paddle and most quartz replaced. Coated and tested. Dep rate is a little lower than the last test. Users should run a test before running a critical deposition. From zpatel at snf.stanford.edu Mon Dec 13 17:32:48 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 13 Dec 2010 17:32:48 -0800 Subject: Comment thermcopoly1 SNF 2010-12-13 17:32:47: boat out Message-ID: boat was out completing P550PI From maurice at snf.stanford.edu Tue Dec 14 14:51:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Dec 2010 14:51:09 -0800 Subject: Comment thermcopoly1 SNF 2010-12-14 14:51:06: created P550PI,P550PIN Message-ID: P550PI: temp 550, B2H6 doped poly, variable time, variable flow N2 purge, variable time Undoped poly, variable time P550PIN: temp 550, B2H6 doped poly, variable time, variable flow N2 purge, variable time Undoped poly, variable time PH3 doped poly, variable time, variable flow From tberg at snf.stanford.edu Thu Dec 16 07:44:20 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Dec 2010 07:44:20 -0800 Subject: Shutdown thermcopoly1 SNF 2010-12-16 07:44:20: for power down Message-ID: From tberg at snf.stanford.edu Wed Dec 29 06:29:27 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Dec 2010 06:29:27 -0800 Subject: Shutdown thermcopoly1 SNF 2010-12-16 07:44:20: for power down Message-ID: Back on after power down