Problem thermcopoly1 SNF 2010-12-07 11:17:20: MF profile open
zpatel at snf.stanford.edu
zpatel at snf.stanford.edu
Tue Dec 7 11:17:20 PST 2010
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Problem thermcopoly1 SNF 2010-12-05 00:13:50: left the chamber in stby mode
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Problem thermcopoly1 SNF 2010-12-07 11:17:20: MF profile open
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position 3 show a profile value of 1420
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Problem thermcopoly1 SNF 2010-12-05 00:13:50: left the chamber in stby mode
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Problem thermcopoly1 SNF 2010-12-07 11:17:20: MF profile open
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