Shutdown thermcopoly1 SNF 2010-12-07 15:18:32: Poly tube broken

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Dec 10 14:06:26 PST 2010


Tube, paddle and most quartz replaced.  Coated and tested.
Dep rate is a little lower than the last test.  Users should run a test before running a critical deposition.




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