Comment thermcopoly1 SNF 2010-12-14 14:51:06: created P550PI,P550PIN

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Dec 14 14:51:09 PST 2010


P550PI: 
temp 550, 
B2H6 doped poly, variable time, variable flow
N2 purge, variable time
Undoped poly, variable time
P550PIN: 
temp 550, 
B2H6 doped poly, variable time, variable flow
N2 purge, variable time
Undoped poly, variable time
PH3 doped poly, variable time, variable flow




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