From zpatel at snf.stanford.edu Fri Jul 2 20:52:19 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 2 Jul 2010 20:52:19 -0700 Subject: Problem thermcopoly1 SNF 2010-07-02 20:52:18: Doped Poly deposition a concern Message-ID: Ring pattern are seen when a program for doped poly is run. P620PH3 with PH3=3sccm From zpatel at snf.stanford.edu Tue Jul 13 14:09:35 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 13 Jul 2010 14:09:35 -0700 Subject: Comment thermcopoly1 SNF 2010-07-13 14:09:34: Dummy wafers Message-ID: Only 2 dummy wafer remaining. There were 3 and 1 cracked From jprovine at snf.stanford.edu Wed Jul 14 00:16:26 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Jul 2010 00:16:26 -0700 Subject: Problem thermcopoly1 SNF 2010-07-14 00:16:25: thermcopoly1 found vented in stand by Message-ID: the pump program stbypoly was not loaded and the system was found in a vented state at midnight wednesday morning. loaded and ran stbypoly but system was likely left vented for many hours before. be aware for critical runs. From jprovine at snf.stanford.edu Wed Jul 14 05:27:14 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 14 Jul 2010 05:27:14 -0700 Subject: Comment thermcopoly1 SNF 2010-07-14 05:27:14: polycoat has been run Message-ID: polycoat has been run since the system was found in vented state. From tberg at snf.stanford.edu Thu Jul 15 06:38:03 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Jul 2010 06:38:03 -0700 Subject: Problem thermcopoly1 SNF 2010-07-14 00:16:25: thermcopoly1 found vented in stand by Message-ID: resolved From tberg at snf.stanford.edu Thu Jul 15 06:38:12 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Jul 2010 06:38:12 -0700 Subject: Comment thermcopoly1 SNF 2010-07-14 05:27:14: polycoat has been run Message-ID: noted From seymour at snf.stanford.edu Thu Jul 22 12:13:14 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 22 Jul 2010 12:13:14 -0700 Subject: Problem thermcopoly1 SNF 2010-07-22 12:13:13: 15% Phosphine/Silane cylinder almost empty Message-ID: Another one on order and due to arrive around 7/29. From tberg at snf.stanford.edu Thu Jul 29 08:35:09 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Jul 2010 08:35:09 -0700 Subject: Comment thermcopoly1 SNF 2010-07-29 08:35:08: did boat and temp cals-loaded standby Message-ID: did boat and temp cals-loaded standby From daesung at snf.stanford.edu Thu Jul 29 23:30:34 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 29 Jul 2010 23:30:34 -0700 Subject: Problem thermcopoly1 SNF 2010-07-29 23:30:34: Boat in problem Message-ID: