Problem thermcopoly1 SNF 2010-07-02 20:52:18: Doped Poly deposition a concern

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Fri Jul 2 20:52:19 PDT 2010


Ring pattern are seen when a program for doped poly is run.
P620PH3 with PH3=3sccm




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