From seymour at snf.stanford.edu Tue Mar 2 07:54:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 07:54:55 -0800 Subject: Comment thermcopoly1 SNF 2010-03-02 07:54:55: tube is leaking Message-ID: I am trying to locate the leak and get the tube up. From seymour at snf.stanford.edu Tue Mar 2 14:03:14 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 14:03:14 -0800 Subject: Shutdown thermcopoly1 SNF 2010-02-23 08:35:34: hi base pressure Message-ID: removed and replaced t/c sheath. tube bases to 10 mT and ROR was 13 mT/min. needs test after repair. From seymour at snf.stanford.edu Tue Mar 2 14:03:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 14:03:55 -0800 Subject: Problem thermcopoly1 SNF 2010-03-02 14:03:55: needs test after repair Message-ID: tube base and ROR are good now. From maurice at snf.stanford.edu Wed Mar 3 08:30:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Mar 2010 08:30:25 -0800 Subject: Comment thermcopoly1 SNF 2010-03-02 07:54:55: tube is leaking Message-ID: TC sheath replaced From maurice at snf.stanford.edu Wed Mar 3 08:30:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Mar 2010 08:30:53 -0800 Subject: Comment thermcopoly1 SNF 2010-02-24 11:31:46: testing pump down Message-ID: faled test. TC sheath replaced need another test From maurice at snf.stanford.edu Wed Mar 3 08:31:06 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Mar 2010 08:31:06 -0800 Subject: Comment thermcopoly1 SNF 2010-02-24 11:08:34: cleaned door sealing surface Message-ID: logged From king at snf.stanford.edu Thu Mar 4 01:16:46 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 4 Mar 2010 01:16:46 -0800 Subject: Comment thermcopoly1 SNF 2010-03-04 01:16:46: Test completed: OK Message-ID: I ran my usual deposition and anneal recipes on two thermal oxide test wafers and the result was within a normal range. Dep conditions were P580PH3; 4sccm PH3; 46.5 min. Annealed 30 min at 950C,. Stripped surface oxide. Thickness = 762A with 130 ohm/sq. From king at snf.stanford.edu Thu Mar 4 03:43:39 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 4 Mar 2010 03:43:39 -0800 Subject: Comment thermcopoly1 SNF 2010-03-04 03:43:39: 2nd run good too Message-ID: Loading 20 wafers vs 6 (includes 4 tube dummies) results in about 5% less deposition. Recipe P580PH3, 4sscm PH3. From maurice at snf.stanford.edu Thu Mar 4 07:11:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Mar 2010 07:11:20 -0800 Subject: Problem thermcopoly1 SNF 2010-03-02 14:03:55: needs test after repair Message-ID: Robin reports: I ran my usual deposition and anneal recipes on two thermal oxide test wafers and the result was within a normal range. Dep conditions were P580PH3; 4sccm PH3; 46.5 min. Annealed 30 min at 950C,. Stripped surface oxide. Thickness = 762A with 130 ohm/sq. From maurice at snf.stanford.edu Fri Mar 5 09:24:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 5 Mar 2010 09:24:20 -0800 Subject: Comment thermcopoly1 SNF 2010-03-05 09:24:19: ran boat cal Message-ID: From maurice at snf.stanford.edu Fri Mar 5 11:43:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 5 Mar 2010 11:43:09 -0800 Subject: Problem thermcopoly1 SNF 2010-03-05 11:43:08: not closing, boat cal issue Message-ID: From ludwig at snf.stanford.edu Fri Mar 5 15:52:33 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 5 Mar 2010 15:52:33 -0800 Subject: Shutdown thermcopoly1 SNF 2010-03-05 15:52:32: calibration, loading system Message-ID: Maurice and Ray are working on it From tberg at snf.stanford.edu Mon Mar 8 06:16:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 06:16:02 -0800 Subject: Comment thermcopoly1 SNF 2010-03-05 09:24:19: ran boat cal Message-ID: Ran boat cal and STBYPOLY looks good From tberg at snf.stanford.edu Mon Mar 8 06:16:13 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 06:16:13 -0800 Subject: Problem thermcopoly1 SNF 2010-03-05 11:43:08: not closing, boat cal issue Message-ID: Ran boat cal and STBYPOLY looks good From tberg at snf.stanford.edu Mon Mar 8 06:16:22 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 06:16:22 -0800 Subject: Shutdown thermcopoly1 SNF 2010-03-05 15:52:32: calibration, loading system Message-ID: From cursive at snf.stanford.edu Tue Mar 23 12:39:58 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 23 Mar 2010 12:39:58 -0700 Subject: Problem thermcopoly1 SNF 2010-03-23 12:39:57: Fail leak check twice Message-ID: Chamber is always at atm., and fail the leak check. From seymour at snf.stanford.edu Tue Mar 23 13:44:36 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 23 Mar 2010 13:44:36 -0700 Subject: Problem thermcopoly1 SNF 2010-03-23 12:39:57: Fail leak check twice Message-ID: tube pumped down at this ttme From tberg at snf.stanford.edu Mon Mar 29 06:18:50 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Mar 2010 06:18:50 -0700 Subject: Problem thermcopoly1 SNF 2010-03-29 06:18:49: No B2H6 flow Message-ID: From tberg at snf.stanford.edu Mon Mar 29 13:42:45 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Mar 2010 13:42:45 -0700 Subject: Problem thermcopoly1 SNF 2010-03-29 06:18:49: No B2H6 flow Message-ID: Found Regulator in the vault backed out. Reset flow is OK now. Checked all Flows Ok