Comment thermcopoly1 SNF 2010-03-04 03:43:39: 2nd run good too

king at snf.stanford.edu king at snf.stanford.edu
Thu Mar 4 03:43:39 PST 2010


Loading 20 wafers vs 6  (includes 4 tube dummies) results in about 5% less deposition.  Recipe P580PH3, 4sscm PH3. 




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