From narii at snf.stanford.edu Sun May 2 03:00:19 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 2 May 2010 03:00:19 -0700 Subject: Problem thermcopoly1 SNF 2010-05-02 03:00:19: PROC error Message-ID: No gas flow while running PGE recipe. Set point for Si was 100 sccm and Ge was 40 sccm. Control panel says the valves are open, but flow is zero. From narii at snf.stanford.edu Sun May 2 14:40:43 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 2 May 2010 14:40:43 -0700 Subject: Problem thermcopoly1 SNF 2010-05-02 14:40:43: Other recipe is fine Message-ID: Looks like PGE is not compatible with the tube. Other recipe (p550ph3) works just fine From maurice at snf.stanford.edu Wed May 5 10:44:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 May 2010 10:44:55 -0700 Subject: Problem thermcopoly1 SNF 2010-05-02 03:00:19: PROC error Message-ID: Ted found a conflict between the hardware and the recipe (the pump time in the recipe was shorter than the hardware time). From maurice at snf.stanford.edu Wed May 5 10:45:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 May 2010 10:45:14 -0700 Subject: Problem thermcopoly1 SNF 2010-05-02 14:40:43: Other recipe is fine Message-ID: Ted found a conflict between the hardware and the recipe (the pump time in the recipe was shorter than the hardware time). From bchui at snf.stanford.edu Fri May 7 01:33:44 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 7 May 2010 01:33:44 -0700 Subject: Problem thermcopoly1 SNF 2010-05-07 01:33:43: Boat-in problems when starting STBYPOLY Message-ID: Had to force the door closed so that pumpdown could start. (Boat was moving in and out seemingly randomly) From tberg at snf.stanford.edu Fri May 7 07:24:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 May 2010 07:24:38 -0700 Subject: Problem thermcopoly1 SNF 2010-05-07 01:33:43: Boat-in problems when starting STBYPOLY Message-ID: Vented tube , boat out ran stby poly no problem, no cal needed From bchui at snf.stanford.edu Fri May 7 11:05:48 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 7 May 2010 11:05:48 -0700 Subject: Problem thermcopoly1 SNF 2010-05-07 11:05:48: Much less poly deposited than expected Message-ID: Ran P580POLY for 3h42min, expected 1.1um, only got 1000A From maurice at snf.stanford.edu Fri May 7 15:37:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 May 2010 15:37:55 -0700 Subject: Problem thermcopoly1 SNF 2010-05-07 11:05:48: Much less poly deposited than expected Message-ID: Ran P580poly for 00:22:30 expected 960 ang actually 1083 ang From tberg at snf.stanford.edu Wed May 12 13:38:01 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 May 2010 13:38:01 -0700 Subject: Shutdown thermcopoly1 SNF 2010-05-12 13:38:01: door interlock problem Message-ID: From tberg at snf.stanford.edu Thu May 13 09:24:04 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 May 2010 09:24:04 -0700 Subject: Shutdown thermcopoly1 SNF 2010-05-12 13:38:01: door interlock problem Message-ID: Reset Door close sensor and did boat cal ran STBYpoly no problem From tberg at snf.stanford.edu Wed May 26 06:05:07 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 May 2010 06:05:07 -0700 Subject: Problem thermcopoly1 SNF 2010-04-27 08:11:45: Observation Message-ID: no problem in over a week From tberg at snf.stanford.edu Wed May 26 06:05:30 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 May 2010 06:05:30 -0700 Subject: Problem thermcopoly1 SNF 2010-04-27 15:33:44: Continued boat in problems Message-ID: no problem in over a week From tberg at snf.stanford.edu Wed May 26 06:05:40 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 May 2010 06:05:40 -0700 Subject: Comment thermcopoly1 SNF 2010-04-29 13:35:25: same problem Message-ID: no problem in over a week From tberg at snf.stanford.edu Wed May 26 06:05:53 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 May 2010 06:05:53 -0700 Subject: Comment thermcopoly1 SNF 2010-03-04 01:16:46: Test completed: OK Message-ID: noted From tberg at snf.stanford.edu Wed May 26 06:06:01 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 May 2010 06:06:01 -0700 Subject: Comment thermcopoly1 SNF 2010-03-04 03:43:39: 2nd run good too Message-ID: noted From tberg at snf.stanford.edu Wed May 26 06:06:18 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 May 2010 06:06:18 -0700 Subject: Comment thermcopoly1 SNF 2010-04-20 12:20:40: Test after Injector replaced Message-ID: noted