Problem thermcopoly1 SNF 2010-05-02 03:00:19: PROC error

narii at snf.stanford.edu narii at snf.stanford.edu
Sun May 2 03:00:19 PDT 2010


No gas flow while running PGE recipe. Set point for Si was 100 sccm and Ge was 40 sccm. Control panel says the valves are open, but flow is zero.




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