Comment thermcopoly1 SNF 2010-09-14 01:16:12: Poly looks OK

king at snf.stanford.edu king at snf.stanford.edu
Tue Sep 14 01:16:13 PDT 2010


A test run and then two device runs today all looked normal; no odd nonuniformities beyond the usual thick edge.  Loaded without empty spaces, about 17 wafers including dummies  (I added more dummies for a total of five).  Positioned between the two marks.
BP580PH3, PH3 = 4sccm, 46 min dep, 900C N2 anneal gave about 635 A.  About 8-10% thinner than typical but not abnormal.
Did the previous commenter load with spaces inbetween wafers?




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