Shutdown thermcopoly1 SNF 2010-09-22 10:05:55: Boat loader fail

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Sep 22 14:04:59 PDT 2010


Vaccuumed broken wafer from loader trench.
Ran boat cal
Loaded/ran  620poly recipe to make sure system would close and pump down
system ok




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