Shutdown thermcopoly1 SNF 2010-09-22 10:05:55: Boat loader fail
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Wed Sep 22 14:04:59 PDT 2010
Vaccuumed broken wafer from loader trench.
Ran boat cal
Loaded/ran 620poly recipe to make sure system would close and pump down
system ok
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