Problem thermcopoly1 SNF 2010-09-23 17:29:37: SiH4 flow deviation

narii at snf.stanford.edu narii at snf.stanford.edu
Thu Sep 23 17:29:38 PDT 2010


While running P550PH3 recipe with PH3 flow of 3 sccm, I noticed that only 1 sccm of SiH4 is flowing, not 150 as intended.




More information about the thermcopoly1-pcs mailing list