From wslee at snf.stanford.edu Wed Aug 10 23:38:44 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 10 Aug 2011 23:38:44 -0700 Subject: Problem thermcopoly1 SNF 2011-08-10 23:38:43: front boat broken Message-ID: From wslee at snf.stanford.edu Thu Aug 11 00:37:32 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 11 Aug 2011 00:37:32 -0700 Subject: Problem thermcopoly1 SNF 2011-08-11 00:37:31: door not closing Message-ID: I ran recipe (P580PH3) and the door did not close so it couldn't pump down. I ran boatcal and tried the same recipe (door still would not close). I removed my wafers and ran POLYCOAT but it is still unable to close and pumpdown. From wslee at snf.stanford.edu Thu Aug 11 00:41:26 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 11 Aug 2011 00:41:26 -0700 Subject: Problem thermcopoly1 SNF 2011-08-11 00:41:25: door not closing; unable to pumpdown Message-ID: I ran P580PH3. The wafers did not boat in completely so it would not pump down. I ran BOATCAL and ran the P580PH3 again and had the problem again. I then ran POLYCOAT to see if that would work, but it still would not boat all the way in and pumpdown (the recipe hit a boatstall step and the tube is still vented). From wslee at snf.stanford.edu Thu Aug 11 00:43:42 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 11 Aug 2011 00:43:42 -0700 Subject: Problem thermcopoly1 SNF 2011-08-11 00:43:41: door not closing completely; furnace will not pumpdown Message-ID: I ran P580PH3 but the door did not close completely and it would not pumpdown. I ran the BOATCAL recipe and tried the P580PH3 recipe again and had the same problem. I removed my wafers and ran POLYCOAT and had the same problem (the recipe hit a boatstall step and ended the recipe). The tube is still vented. From wslee at snf.stanford.edu Thu Aug 11 00:44:48 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 11 Aug 2011 00:44:48 -0700 Subject: Comment thermcopoly1 SNF 2011-08-11 00:44:47: sorry for the multiple problem reports Message-ID: They were not appearing in on my coral screen. From tberg at snf.stanford.edu Thu Aug 11 07:28:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Aug 2011 07:28:00 -0700 Subject: Problem thermcopoly1 SNF 2011-08-10 23:38:43: front boat broken Message-ID: replaced boat and intermediate stand From tberg at snf.stanford.edu Thu Aug 11 07:30:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Aug 2011 07:30:04 -0700 Subject: Problem thermcopoly1 SNF 2011-08-11 00:37:31: door not closing Message-ID: did boat cal and ran standby poly. door closed fine, base and leak rate fine From tberg at snf.stanford.edu Thu Aug 11 07:30:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Aug 2011 07:30:20 -0700 Subject: Problem thermcopoly1 SNF 2011-08-11 00:41:25: door not closing; unable to pumpdown Message-ID: did boat cal and ran standby poly. door closed fine, base and leak rate fine From tberg at snf.stanford.edu Thu Aug 11 07:30:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Aug 2011 07:30:35 -0700 Subject: Problem thermcopoly1 SNF 2011-08-11 00:43:41: door not closing completely; furnace will not pumpdown Message-ID: did boat cal and ran standby poly. door closed fine, base and leak rate fine From tberg at snf.stanford.edu Thu Aug 11 07:30:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Aug 2011 07:30:49 -0700 Subject: Comment thermcopoly1 SNF 2011-08-11 00:44:47: sorry for the multiple problem reports Message-ID: No problem From tberg at snf.stanford.edu Thu Aug 11 07:31:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 11 Aug 2011 07:31:31 -0700 Subject: Comment thermcopoly1 SNF 2011-06-13 14:10:55: new germane cylinder p[assed leak check Message-ID: noted From tberg at snf.stanford.edu Fri Aug 12 07:25:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Aug 2011 07:25:57 -0700 Subject: Problem thermcopoly1 SNF 2011-08-12 07:25:56: no PH3 Message-ID: PH3 is currenly off From tberg at snf.stanford.edu Mon Aug 15 09:09:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 09:09:27 -0700 Subject: Problem thermcopoly1 SNF 2011-08-12 07:25:56: no PH3 Message-ID: PH3 is back on From dongrip at snf.stanford.edu Tue Aug 23 15:52:24 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 23 Aug 2011 15:52:24 -0700 Subject: Problem thermcopoly1 SNF 2011-08-23 15:52:24: wall thickness is too high? Message-ID: I found small fragments (look like small pieces of Si) around the edge of the processing wafers after the poly run several times. Additionally, if you look into the entrance portion inside the tube, you can see some peeling-like stuff there. Is all related to the too high wall thickness? According to the log-book, it says ~ 100 microns. Please inspect this problem. Thanks. From tberg at snf.stanford.edu Thu Aug 25 08:29:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:29:46 -0700 Subject: Shutdown thermcopoly1 SNF 2011-08-25 08:29:46: vacuuming out particles Message-ID: From tberg at snf.stanford.edu Thu Aug 25 13:50:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 13:50:12 -0700 Subject: Shutdown thermcopoly1 SNF 2011-08-25 08:29:46: vacuuming out particles Message-ID: Cooled tube down and vacuumed out all loose particles. Heated back up -leak checked. In stby poly From tberg at snf.stanford.edu Thu Aug 25 13:50:24 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 13:50:24 -0700 Subject: Problem thermcopoly1 SNF 2011-08-23 15:52:24: wall thickness is too high? Message-ID: Cooled tube down and vacuumed out all loose particles. Heated back up -leak checked. In stby poly