Problem thermcopoly1 SNF 2011-08-11 00:37:31: door not closing

wslee at snf.stanford.edu wslee at snf.stanford.edu
Thu Aug 11 00:37:32 PDT 2011


I ran recipe (P580PH3) and the door did not close so it couldn't pump down.  I ran boatcal and tried the same recipe (door still would not close).  I removed my wafers and ran POLYCOAT but it is still unable to close and pumpdown.




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