Problem thermcopoly1 SNF 2011-08-11 00:41:25: door not closing; unable to pumpdown

wslee at snf.stanford.edu wslee at snf.stanford.edu
Thu Aug 11 00:41:26 PDT 2011


I ran P580PH3.  The wafers did not boat in completely so it would not pump down.  I ran BOATCAL and ran the P580PH3 again and had the problem again.  I then ran POLYCOAT to see if that would work, but it still would not boat all the way in and pumpdown (the recipe hit a boatstall step and the tube is still vented).  




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