Problem thermcopoly1 SNF 2011-08-23 15:52:24: wall thickness is too high?

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Tue Aug 23 15:52:24 PDT 2011


I found small fragments (look like small pieces of Si) around the edge of the processing wafers after the poly run several times. Additionally, if you look into the entrance portion inside the tube, you can see some peeling-like stuff there. Is all related to the too high wall thickness? According to the log-book, it says ~ 100 microns. Please inspect this problem. Thanks.




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