From maurice at snf.stanford.edu  Mon Jan  3 16:39:43 2011
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 3 Jan 2011 16:39:43 -0800
Subject: Problem thermcopoly1 SNF 2011-01-03 16:39:42: needs test after shutdown
Message-ID: <mailman.667.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Jan  4 13:50:25 2011
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 4 Jan 2011 13:50:25 -0800
Subject: Problem thermcopoly1 SNF 2011-01-03 16:39:42: needs test after shutdown
Message-ID: <mailman.668.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>

Test complete
P580POLY   00:23:30
expected 850 Ang
actual 840 (center)
ctblr
840,839,845,844,841



From narii at snf.stanford.edu  Wed Jan  5 01:18:44 2011
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Wed, 5 Jan 2011 01:18:44 -0800
Subject: Shutdown thermcopoly1 SNF 2011-01-05 01:18:44: No SiH4, PH3 Flow
Message-ID: <mailman.669.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>

While running P550PH3 recipe, proc err occured. No SiH4 flow and PH3 flow at all.



From tberg at snf.stanford.edu  Wed Jan  5 10:01:12 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 5 Jan 2011 10:01:12 -0800
Subject: Shutdown thermcopoly1 SNF 2011-01-05 01:18:44: No SiH4, PH3 Flow
Message-ID: <mailman.670.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>

Found valve in gas panel closed- opened and pressure for SiH4 is OK



From zpatel at snf.stanford.edu  Wed Jan 12 11:00:54 2011
From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu)
Date: Wed, 12 Jan 2011 11:00:54 -0800
Subject: Problem thermcopoly1 SNF 2011-01-12 11:00:54:  4inch wafer boat came out broken (EOM)
Message-ID: <mailman.671.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Thu Jan 13 14:29:53 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 13 Jan 2011 14:29:53 -0800
Subject: Problem thermcopoly1 SNF 2011-01-12 11:00:54:  4inch wafer boat came out broken (EOM)
Message-ID: <mailman.672.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>

boat was replaced



From daesung at snf.stanford.edu  Fri Jan 14 00:42:23 2011
From: daesung at snf.stanford.edu (daesung at snf.stanford.edu)
Date: Fri, 14 Jan 2011 00:42:23 -0800
Subject: Problem thermcopoly1 SNF 2011-01-14 00:42:23: Leak check fail
Message-ID: <mailman.673.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>

Problem occured twice



From tberg at snf.stanford.edu  Fri Jan 14 06:37:40 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 14 Jan 2011 06:37:40 -0800
Subject: Problem thermcopoly1 SNF 2011-01-14 00:42:23: Leak check fail
Message-ID: <mailman.674.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>

Did boat cal ran STBYPOLY no problem. Did not touch wafers



From maurice at snf.stanford.edu  Mon Jan 31 11:06:41 2011
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 31 Jan 2011 11:06:41 -0800
Subject: Comment thermcopoly1 SNF 2011-01-31 11:06:40: added 3 dummies
Message-ID: <mailman.675.1356283574.4877.thermcopoly1-pcs@snf.stanford.edu>