Shutdown thermcopoly1 SNF 2011-01-05 01:18:44: No SiH4, PH3 Flow

narii at snf.stanford.edu narii at snf.stanford.edu
Wed Jan 5 01:18:44 PST 2011


While running P550PH3 recipe, proc err occured. No SiH4 flow and PH3 flow at all.




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