Problem thermcopoly1 SNF 2011-01-12 11:00:54: 4inch wafer boat came out broken (EOM)
zpatel at snf.stanford.edu
zpatel at snf.stanford.edu
Wed Jan 12 11:00:54 PST 2011
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Shutdown thermcopoly1 SNF 2011-01-05 01:18:44: No SiH4, PH3 Flow
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Problem thermcopoly1 SNF 2011-01-12 11:00:54: 4inch wafer boat came out broken (EOM)
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Shutdown thermcopoly1 SNF 2011-01-05 01:18:44: No SiH4, PH3 Flow
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Problem thermcopoly1 SNF 2011-01-12 11:00:54: 4inch wafer boat came out broken (EOM)
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