From bchui at snf.stanford.edu Sat Mar 12 15:30:07 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 12 Mar 2011 15:30:07 -0800 Subject: Problem thermcopoly1 SNF 2011-03-12 15:30:06: dummies are sticking to the boat slots Message-ID: I think they got so much accumulated deposition they actually got thicker. From bchui at snf.stanford.edu Sun Mar 13 16:35:17 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 13 Mar 2011 16:35:17 -0700 Subject: Comment thermcopoly1 SNF 2011-03-13 16:35:17: Re: my previous post Message-ID: Correction: I think the boat slots themselves are getting too narrow due to accumulation of deposits. One of my own test wafers also got nicked because it was 'stuck' in the slot while I was trying to take it out. From tberg at snf.stanford.edu Tue Mar 15 06:58:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Mar 2011 06:58:31 -0700 Subject: Problem thermcopoly1 SNF 2011-03-12 15:30:06: dummies are sticking to the boat slots Message-ID: Replaced 4 inch boats, did boat cal, ran stbypoly no problem From tberg at snf.stanford.edu Tue Mar 15 06:58:43 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Mar 2011 06:58:43 -0700 Subject: Comment thermcopoly1 SNF 2011-03-13 16:35:17: Re: my previous post Message-ID: Replaced 4 inch boats, did boat cal, ran stbypoly no problem From narii at snf.stanford.edu Tue Mar 15 16:38:22 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 15 Mar 2011 16:38:22 -0700 Subject: Problem thermcopoly1 SNF 2011-03-15 16:38:21: P620PH3 recipe is not working Message-ID: It seems like to be assigned to nitride tube From tberg at snf.stanford.edu Mon Mar 21 13:00:45 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Mar 2011 13:00:45 -0700 Subject: Problem thermcopoly1 SNF 2011-03-15 16:38:21: P620PH3 recipe is not working Message-ID: Recipe changed tp Poly From bchui at snf.stanford.edu Tue Mar 22 00:58:20 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 22 Mar 2011 00:58:20 -0700 Subject: Problem thermcopoly1 SNF 2011-03-22 00:58:20: very low dep rate Message-ID: Ran P580poly for 1h 45min, expected 4000A, got only 600A. Monitor wafer does look uniform though; just way low thickness. From tberg at snf.stanford.edu Tue Mar 22 06:10:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Mar 2011 06:10:14 -0700 Subject: Problem thermcopoly1 SNF 2011-03-22 00:58:20: very low dep rate Message-ID: Air operated valve to cylinder was not opened-opened From bchui at snf.stanford.edu Thu Mar 24 15:10:16 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 24 Mar 2011 15:10:16 -0700 Subject: Problem thermcopoly1 SNF 2011-03-24 15:10:15: zero dep rate Message-ID: Ran P580poly for 1.5 hours, got ZERO dep. This is in addition to my earlier reported problem of 1/6 the expected dep rate two days ago. Can someone please look into whether the P580poly recipe is corrupted? Srikantv ran a 620C PH recipe just before me and I think his run came out fine. From srikantv at snf.stanford.edu Thu Mar 24 16:40:39 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Thu, 24 Mar 2011 16:40:39 -0700 Subject: Problem thermcopoly1 SNF 2011-03-24 16:40:39: low dep rate Message-ID: i got only 100nm poly deposited after 1 hour of P630PH3 From bchui at snf.stanford.edu Thu Mar 24 16:43:30 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 24 Mar 2011 16:43:30 -0700 Subject: Comment thermcopoly1 SNF 2011-03-24 16:43:29: Previous user also had low dep rate Message-ID: Srikantv says he got 1000A P620PH3 in 1h dep, which is quite low. From bchui at snf.stanford.edu Thu Mar 24 16:53:02 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 24 Mar 2011 16:53:02 -0700 Subject: Shutdown thermcopoly1 SNF 2011-03-24 16:53:01: Low to zero dep rate Message-ID: Please see previous three reports/comments From tberg at snf.stanford.edu Fri Mar 25 08:31:29 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 Mar 2011 08:31:29 -0700 Subject: Shutdown thermcopoly1 SNF 2011-03-24 16:53:01: Low to zero dep rate Message-ID: Found door not closing, did boat cal. Ran p580poly with no problems. Gas flows were fine, pressure was fine, temps were fine. Recipe appeara to have no problems. will leave for observation. From tberg at snf.stanford.edu Fri Mar 25 08:32:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 25 Mar 2011 08:32:07 -0700 Subject: Comment thermcopoly1 SNF 2011-03-25 08:32:06: Ran p580 poly no problem Message-ID: From maurice at snf.stanford.edu Fri Mar 25 13:14:39 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Mar 2011 13:14:39 -0700 Subject: Comment thermcopoly1 SNF 2011-03-25 13:14:38: Ran p580poly test/good Message-ID: Ran P580poly 00:23:30 expected 970 ang Actual 998 ang rate is good From maurice at snf.stanford.edu Fri Mar 25 13:15:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Mar 2011 13:15:38 -0700 Subject: Problem thermcopoly1 SNF 2011-03-24 15:10:15: zero dep rate Message-ID: Ran P580poly 00:23:30 expected 970 ang Actual 998 ang rate is good From kenney at snf.stanford.edu Fri Mar 25 14:50:37 2011 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Fri, 25 Mar 2011 14:50:37 -0700 Subject: Shutdown thermcopoly1 SNF 2011-03-25 14:50:36: Low dep rate Message-ID: P620PH3 with phosphine - flow 6 00:20:00 deposition time expected about 3000A measured 409 A From tberg at snf.stanford.edu Mon Mar 28 08:19:09 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 28 Mar 2011 08:19:09 -0700 Subject: Comment thermcopoly1 SNF 2011-03-28 08:19:08: ran P620PH3 Message-ID: Ran recipe P620PH3 saw no problem. Door closed fine SiH4 setpoint-150sccm flow-150sccm, PH3 setpoint- 6 sccm flow- 6 sccm, Pressure setpoint-200mT actual-198mT. All temps were fine. I ran the run for 10 minutes with no deviations or errors From maurice at snf.stanford.edu Mon Mar 28 15:18:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Mar 2011 15:18:41 -0700 Subject: Shutdown thermcopoly1 SNF 2011-03-25 14:50:36: Low dep rate Message-ID: Dep rate good I ran P620PH3 for 60 minutes and got 975 ang...16.25Ang/min. On Friday we ran the same recipe for 20 minutes and got 409 ang...20.45 ang/min. On 4/20/2010 Cursive ran the same recipe for 60 minutes and got 970 ang...16.16 Ang/min (I chose his run because he put a measured thickness in the logbook). >From the graph of Ed/Robin initial test the growth rate should be ~21 ang/min. Ted called his guys at Tystar (I think Ted said Tystar...I could be wrong on his source) and they expected something in the range that we are getting. From maurice at snf.stanford.edu Mon Mar 28 15:19:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Mar 2011 15:19:29 -0700 Subject: Problem thermcopoly1 SNF 2011-03-24 16:40:39: low dep rate Message-ID: dep rate good see comment from 3/28/11 From maurice at snf.stanford.edu Mon Mar 28 15:20:10 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Mar 2011 15:20:10 -0700 Subject: Comment thermcopoly1 SNF 2011-03-24 16:43:29: Previous user also had low dep rate Message-ID: dep rate normal From maurice at snf.stanford.edu Mon Mar 28 15:20:21 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Mar 2011 15:20:21 -0700 Subject: Comment thermcopoly1 SNF 2011-03-25 08:32:06: Ran p580 poly no problem Message-ID: logged From maurice at snf.stanford.edu Mon Mar 28 15:20:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 28 Mar 2011 15:20:36 -0700 Subject: Comment thermcopoly1 SNF 2011-03-25 13:14:38: Ran p580poly test/good Message-ID: logged