Comment thermcopoly1 SNF 2011-03-13 16:35:17: Re: my previous post

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Mar 13 16:35:17 PDT 2011


Correction: I think the boat slots themselves are getting too narrow due to accumulation of deposits.  One of my own test wafers also got nicked because it was 'stuck' in the slot while I was trying to take it out.




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