Problem thermcopoly1 SNF 2011-03-22 00:58:20: very low dep rate

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Mar 22 00:58:20 PDT 2011


Ran P580poly for 1h 45min, expected 4000A, got only 600A.  Monitor wafer does look uniform though; just way low thickness.




More information about the thermcopoly1-pcs mailing list