Shutdown thermcopoly1 SNF 2011-03-25 14:50:36: Low dep rate

kenney at snf.stanford.edu kenney at snf.stanford.edu
Fri Mar 25 14:50:37 PDT 2011

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P620PH3 with phosphine - flow 6
00:20:00 deposition time
expected about 3000A
measured 409 A

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