Comment thermcopoly1 SNF 2011-03-28 08:19:08: ran P620PH3

tberg at snf.stanford.edu tberg at snf.stanford.edu
Mon Mar 28 08:19:09 PDT 2011


Ran recipe P620PH3 saw no problem. Door closed fine SiH4 setpoint-150sccm flow-150sccm, PH3 setpoint- 6 sccm flow- 6 sccm, Pressure setpoint-200mT actual-198mT. All temps were fine. I ran the run for 10 minutes with no deviations or errors




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