From tberg at snf.stanford.edu Mon May 2 06:32:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 May 2011 06:32:14 -0700 Subject: Problem thermcopoly1 SNF 2011-04-29 23:19:47: Cantilever transport problem Message-ID: Ran boat cal and stbypoly looked fine From tberg at snf.stanford.edu Mon May 2 06:32:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 May 2011 06:32:36 -0700 Subject: Comment thermcopoly1 SNF 2011-04-26 18:01:03: Found tube vented Message-ID: noted From wslee at snf.stanford.edu Tue May 3 16:22:22 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 3 May 2011 16:22:22 -0700 Subject: Problem thermcopoly1 SNF 2011-05-03 16:22:21: quartz wand broken Message-ID: From tberg at snf.stanford.edu Wed May 4 06:18:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 4 May 2011 06:18:56 -0700 Subject: Problem thermcopoly1 SNF 2011-05-03 16:22:21: quartz wand broken Message-ID: Replaced broken wand From dongrip at snf.stanford.edu Wed May 4 23:39:50 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 4 May 2011 23:39:50 -0700 Subject: Comment thermcopoly1 SNF 2011-05-04 23:39:49: need a boat cal Message-ID: From narii at snf.stanford.edu Sun May 8 14:37:25 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 8 May 2011 14:37:25 -0700 Subject: Problem thermcopoly1 SNF 2011-05-08 14:37:24: Boat Calib Tol. error Message-ID: System won't work From tberg at snf.stanford.edu Mon May 9 07:38:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:38:38 -0700 Subject: Problem thermcopoly1 SNF 2011-05-08 14:37:24: Boat Calib Tol. error Message-ID: found element breaker off , tube computer not functional-reset tube computer, did boat and temp cal. ran stbypoly OK From tberg at snf.stanford.edu Mon May 9 07:38:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 May 2011 07:38:55 -0700 Subject: Comment thermcopoly1 SNF 2011-05-04 23:39:49: need a boat cal Message-ID: done From tberg at snf.stanford.edu Tue May 10 06:27:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 May 2011 06:27:57 -0700 Subject: Problem thermcopoly1 SNF 2011-05-10 06:27:57: GeH4 Cylinder Change Message-ID: From seymour at snf.stanford.edu Tue May 10 07:42:12 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 May 2011 07:42:12 -0700 Subject: Comment thermcopoly1 SNF 2011-05-10 07:42:12: germane cylinder changed Message-ID: on leak check at this time From tberg at snf.stanford.edu Tue May 10 13:57:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 May 2011 13:57:03 -0700 Subject: Problem thermcopoly1 SNF 2011-05-10 06:27:57: GeH4 Cylinder Change Message-ID: Cylinder changed, Leak checked From tberg at snf.stanford.edu Tue May 10 13:57:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 May 2011 13:57:12 -0700 Subject: Comment thermcopoly1 SNF 2011-05-10 07:42:12: germane cylinder changed Message-ID: Cylinder changed, Leak checked From jprovine at snf.stanford.edu Mon May 23 07:24:30 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 May 2011 07:24:30 -0700 Subject: Problem thermcopoly1 SNF 2011-05-23 07:24:29: SiH4 flow and other alarm Message-ID: running P620POLY recipe, the system alarmed in deposition step for SiH4 flow problem...set point is 150sccm but actual flow is 1.00 sccm. wafers still in furnace and furnace at low pressure waiting to stabilize parameters. From jprovine at snf.stanford.edu Mon May 23 09:44:25 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 23 May 2011 09:44:25 -0700 Subject: Problem thermcopoly1 SNF 2011-05-23 09:44:24: follow up on last night's aborted run Message-ID: about an hour into deposition (confirmed by film deposited on wafer) the N2 started to flow, which triggered an overpressure alarm and stopped the run during deposition. trying to complete deposition now. From tberg at snf.stanford.edu Tue May 24 06:28:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 May 2011 06:28:33 -0700 Subject: Problem thermcopoly1 SNF 2011-05-23 07:24:29: SiH4 flow and other alarm Message-ID: System was in boat stall so only N2 was flowing From tberg at snf.stanford.edu Tue May 24 07:52:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 May 2011 07:52:06 -0700 Subject: Problem thermcopoly1 SNF 2011-05-23 09:44:24: follow up on last night's aborted run Message-ID: Ran boat cal and stby poly From popomoo at snf.stanford.edu Thu May 26 12:21:21 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Thu, 26 May 2011 12:21:21 -0700 Subject: Problem thermcopoly1 SNF 2011-05-26 12:21:21: Boat stalled Message-ID: I got the problem 'Bo\at Stalled' twice in series. From tberg at snf.stanford.edu Thu May 26 13:53:39 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 May 2011 13:53:39 -0700 Subject: Comment thermcopoly1 SNF 2011-05-26 13:53:38: Got it going Message-ID: Got it going but it needs a cal and update. wafers were in so i pushed boat in manually From popomoo at snf.stanford.edu Thu May 26 16:04:56 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Thu, 26 May 2011 16:04:56 -0700 Subject: Comment thermcopoly1 SNF 2011-05-26 16:04:56: no more log sheet!! Message-ID: