Problem thermcopoly1 SNF 2011-05-23 09:44:24: follow up on last night's aborted run

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Mon May 23 09:44:25 PDT 2011


about an hour into deposition (confirmed by film deposited on wafer) the N2 started to flow, which triggered an overpressure alarm and stopped the run during deposition.  trying to complete deposition now.




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