From bchui at snf.stanford.edu Mon Nov 14 16:04:37 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 14 Nov 2011 16:04:37 -0800 Subject: Problem thermcopoly1 SNF 2011-11-14 16:04:36: Got much less poly than expected Message-ID: tried to run P580poly for 7 hours targeting 1.6um yesterday, got only 4000a. tube was in alarm mode when I arrived to unload the wafers this morning (had to run POLYOUT to get the tube out). I had verified that the tube was running normally in the depositing step before I left yesterday. From tberg at snf.stanford.edu Tue Nov 15 10:56:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 10:56:27 -0800 Subject: Problem thermcopoly1 SNF 2011-11-14 16:04:36: Got much less poly than expected Message-ID: Reset tube computer. Reloaded configuration. Did boat and temp cal. Wafers were still inside and recipe was still loaded. From hsyoon at snf.stanford.edu Wed Nov 30 23:02:58 2011 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Wed, 30 Nov 2011 23:02:58 -0800 Subject: Problem thermcopoly1 SNF 2011-11-30 23:02:57: not deposited after 17 hrs Message-ID: measure thickness with oxidized dummy wafer. targetted 6000A but measured only 15 A. (P550PH3 with 8sccm for 17 hrs used) * after the deposition temperature did not ramp down, somthing problem or error during the deposition ??