Problem thermcopoly1 SNF 2011-11-14 16:04:36: Got much less poly than expected

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Nov 14 16:04:37 PST 2011


tried to run P580poly for 7 hours targeting 1.6um yesterday, got only 4000a.  tube was in alarm mode when I arrived to unload the wafers this morning (had to run POLYOUT to get the tube out).  I had verified that the tube was running normally in the depositing step before I left yesterday.




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