Problem thermcopoly1 SNF 2011-11-30 23:02:57: not deposited after 17 hrs

hsyoon at snf.stanford.edu hsyoon at snf.stanford.edu
Wed Nov 30 23:02:58 PST 2011


measure thickness with oxidized dummy wafer. targetted 6000A but measured only 15 A. (P550PH3 with 8sccm for 17 hrs used)
* after the deposition temperature did not ramp down, somthing problem or error during the deposition ??




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