Problem thermcopoly1 SNF 2011-11-30 23:02:57: not deposited after 17 hrs

[hsyoon at snf.stanford.edu]

measure thickness with oxidized dummy wafer. targetted 6000A but measured only 15 A. (P550PH3 with 8sccm for 17 hrs used)
* after the deposition temperature did not ramp down, somthing problem or error during the deposition ??