From narii at snf.stanford.edu  Sat Oct  1 19:27:42 2011
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Sat, 1 Oct 2011 19:27:42 -0700
Subject: Problem thermcopoly1 SNF 2011-10-01 19:27:41: boat stall error
Message-ID: <mailman.797.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Unable to run deposition recipe.



From tberg at snf.stanford.edu  Mon Oct  3 06:42:15 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 3 Oct 2011 06:42:15 -0700
Subject: Problem thermcopoly1 SNF 2011-10-01 19:27:41: boat stall error
Message-ID: <mailman.798.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

ran boat cal and STBYPOLY no problem



From tberg at snf.stanford.edu  Thu Oct 13 08:01:34 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 13 Oct 2011 08:01:34 -0700
Subject: Problem thermcopoly1 SNF 2011-09-29 00:07:33: no dummy wafer
Message-ID: <mailman.799.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Dummies are there



From mtang at snf.stanford.edu  Fri Oct 21 21:56:17 2011
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Fri, 21 Oct 2011 21:56:17 -0700
Subject: Problem thermcopoly1 SNF 2011-10-21 21:56:16: No GeH4
Message-ID: <mailman.800.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Toxic monitoring sensor for this cabinet failed, so we cannot run this gas.



From tberg at snf.stanford.edu  Tue Oct 25 06:26:50 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 25 Oct 2011 06:26:50 -0700
Subject: Shutdown thermcopoly1 SNF 2011-10-25 06:26:49: water work
Message-ID: <mailman.801.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Tue Oct 25 11:20:15 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 25 Oct 2011 11:20:15 -0700
Subject: Shutdown thermcopoly1 SNF 2011-10-25 06:26:49: water work
Message-ID: <mailman.802.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

water work done



From tberg at snf.stanford.edu  Wed Oct 26 14:04:11 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 26 Oct 2011 14:04:11 -0700
Subject: Problem thermcopoly1 SNF 2011-10-21 21:56:16: No GeH4
Message-ID: <mailman.803.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Repaired GeH4 sensor. No indication for 3 hours-bacK on line.