From wslee at snf.stanford.edu Thu Sep 1 16:55:31 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 1 Sep 2011 16:55:31 -0700 Subject: Comment thermcopoly1 SNF 2011-09-01 16:55:31: out of logsheets Message-ID: From maurice at snf.stanford.edu Thu Sep 1 17:05:26 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Sep 2011 17:05:26 -0700 Subject: Comment thermcopoly1 SNF 2011-09-01 16:55:31: out of logsheets Message-ID: Scott got more From pnataraj at snf.stanford.edu Sun Sep 4 22:09:47 2011 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 4 Sep 2011 22:09:47 -0700 Subject: Problem thermcopoly1 SNF 2011-09-04 22:09:46: Computer screen Message-ID: The computer screen is in the prompt mode. As of now thermocopoly1 is under pumpdown. The next user need to use polyout first and load the prog From tberg at snf.stanford.edu Tue Sep 6 07:07:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Sep 2011 07:07:06 -0700 Subject: Problem thermcopoly1 SNF 2011-09-04 22:09:46: Computer screen Message-ID: Reset stack computer, all tubes look normal now From tberg at snf.stanford.edu Tue Sep 6 10:53:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Sep 2011 10:53:21 -0700 Subject: Shutdown thermcopoly1 SNF 2011-09-06 10:53:21: burnbox down Message-ID: From tberg at snf.stanford.edu Wed Sep 7 09:47:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 7 Sep 2011 09:47:14 -0700 Subject: Shutdown thermcopoly1 SNF 2011-09-06 10:53:21: burnbox down Message-ID: Burnbox element replaced back at temp and functional. From chienyuc at snf.stanford.edu Thu Sep 8 21:39:06 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 8 Sep 2011 21:39:06 -0700 Subject: Problem thermcopoly1 SNF 2011-09-08 21:39:05: No Ge deposition Message-ID: Ran recipe PGE twice (yesterday and today) on bare Si and oxide dummy. Found there is no Ge deposition. Conditions are given below: GeH4=20 sccm, 300C, 400mtorr for 3 hours. Same recipe works in thermcopoly2 before. No flow or temperature problem found during the whole process. From chienyuc at snf.stanford.edu Thu Sep 8 21:39:56 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 8 Sep 2011 21:39:56 -0700 Subject: Problem thermcopoly1 SNF 2011-09-08 21:39:55: door not close Message-ID: After deposition run, recipe STBYPOLY cannot pump down and found door not close. From tberg at snf.stanford.edu Fri Sep 9 06:46:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Sep 2011 06:46:17 -0700 Subject: Problem thermcopoly1 SNF 2011-09-08 21:39:55: door not close Message-ID: Ran boat cal, checked door close fine. ran stbypoly no problem From tberg at snf.stanford.edu Fri Sep 9 06:47:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Sep 2011 06:47:25 -0700 Subject: Comment thermcopoly1 SNF 2011-09-09 06:47:25: Checked GeH4 flow manually Message-ID: Checked GeH4 flow manually, it was fine. needs further checkout by process From chienyuc at snf.stanford.edu Sun Sep 11 20:20:30 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sun, 11 Sep 2011 20:20:30 -0700 Subject: Comment thermcopoly1 SNF 2011-09-11 20:20:30: Ge film hazy but have deposition Message-ID: Ran PGE at 400mtorr, 400C, 2 hours and got 0.48um Ge film although looks hazy. Film quality and thickness are similar (by woollam) on both bare Si and SiO2 dummy. From maurice at snf.stanford.edu Fri Sep 16 11:49:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 Sep 2011 11:49:57 -0700 Subject: Problem thermcopoly1 SNF 2011-09-08 21:39:05: No Ge deposition Message-ID: User now reports that there is Ge deposition. Recipe needs to be optimized. From maurice at snf.stanford.edu Fri Sep 16 11:50:10 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 Sep 2011 11:50:10 -0700 Subject: Comment thermcopoly1 SNF 2011-09-09 06:47:25: Checked GeH4 flow manually Message-ID: logged From tberg at snf.stanford.edu Tue Sep 20 07:28:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 07:28:55 -0700 Subject: Shutdown thermcopoly1 SNF 2011-09-20 07:28:54: burnbox dead Message-ID: From tberg at snf.stanford.edu Tue Sep 20 09:53:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 09:53:25 -0700 Subject: Comment thermcopoly1 SNF 2011-09-20 09:53:24: CB ordered here tomorrow Message-ID: From tberg at snf.stanford.edu Wed Sep 21 12:39:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Sep 2011 12:39:06 -0700 Subject: Shutdown thermcopoly1 SNF 2011-09-20 07:28:54: burnbox dead Message-ID: Replaced 30 A heater CB. back up to temp From tberg at snf.stanford.edu Wed Sep 21 12:39:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Sep 2011 12:39:13 -0700 Subject: Comment thermcopoly1 SNF 2011-09-20 09:53:24: CB ordered here tomorrow Message-ID: Replaced 30 A heater CB. back up to temp From dongrip at snf.stanford.edu Wed Sep 21 23:08:40 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 21 Sep 2011 23:08:40 -0700 Subject: Problem thermcopoly1 SNF 2011-09-21 23:08:40: zone 3 temperature profile looks weird Message-ID: temperature profile at zone 3 suddenly changed to around 300 from 500 celsius degree for sometime. Please take a look. From dongrip at snf.stanford.edu Wed Sep 21 23:46:53 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 21 Sep 2011 23:46:53 -0700 Subject: Shutdown thermcopoly1 SNF 2011-09-21 23:46:53: leak fail Message-ID: while running stbypoly, the tube can't be pumped down (leak fail...). I shut down this tool because the pressure doesn't go down after confirming that the door is fully closed. From tberg at snf.stanford.edu Thu Sep 22 10:19:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Sep 2011 10:19:12 -0700 Subject: Shutdown thermcopoly1 SNF 2011-09-21 23:46:53: leak fail Message-ID: Replaced broken TC sheath and removed broken 6" boat. back in standby poly. Base pressure and leak rate fine. Temp is controlling fine From tberg at snf.stanford.edu Thu Sep 22 10:19:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 22 Sep 2011 10:19:33 -0700 Subject: Problem thermcopoly1 SNF 2011-09-21 23:08:40: zone 3 temperature profile looks weird Message-ID: Temp is controlling fine From dongrip at snf.stanford.edu Thu Sep 29 00:07:33 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 29 Sep 2011 00:07:33 -0700 Subject: Problem thermcopoly1 SNF 2011-09-29 00:07:33: no dummy wafer Message-ID: Can you please put dummy wafers inside the tube? Thanks a lot!