Comment thermcopoly1 SNF 2011-09-11 20:20:30: Ge film hazy but have deposition

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Sun Sep 11 20:20:30 PDT 2011


Ran PGE at 400mtorr, 400C, 2 hours and got 0.48um Ge film although looks hazy.  Film quality and thickness are similar (by woollam) on both bare Si and SiO2 dummy.




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