Comment thermcopoly1 SNF 2012-04-02 08:20:29: tube status

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Apr 2 08:20:30 PDT 2012


I foundtube pump down with 1 slpm n2 flow, pressure 238 mT. State is process hold recipe is JRS501. The tube is on hold in temp stabelize step. The temp is ok. I dont see any problems causing the tube to be down in problem mode.




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