From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-08-09 12:09:14: TGO issue Message-ID: <15275196.91.1344539354887.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-08-09 12:09:14: TGO issue Message-ID: <25996982.15.1344892893578.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-16 06:55:50: added oil to pump Message-ID: <21084526.67.1345125350983.JavaMail.coral@shine> From lindaw at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-08-17 15:10:44: pumps down- power glitch Fri. afternoon Message-ID: <7068512.143.1345241444074.JavaMail.coral@shine> pumps are down due to power glitch at ~2:55 pm on Friday. Will probably be down all weekend. From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-21 06:12:03: pull and clean Message-ID: <17972912.1.1345554723277.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-21 11:34:26: tube replaced leak checking Message-ID: <25340734.13.1345574066508.JavaMail.coral@shine> tube replaced leak checking From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-22 11:51:33: Leak rate good at temp Message-ID: <32852202.47.1345661493906.JavaMail.coral@shine> Running coat for 45min in p620poly From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-08-17 15:10:44: pumps down- power glitch Fri. afternoon Message-ID: <18294553.48.1345661545296.JavaMail.coral@shine> Replaced tube, cleaned boats, running coat From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-16 06:55:50: added oil to pump Message-ID: <8405899.49.1345661563414.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-21 06:12:03: pull and clean Message-ID: <7247337.50.1345661595582.JavaMail.coral@shine> tube changed, boats cleaned, runni9ng coat From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-21 11:34:26: tube replaced leak checking Message-ID: <8193198.51.1345661610730.JavaMail.coral@shine> tube changed, boats cleaned, runni9ng coat From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-08-22 11:53:55: Will need test after coat Message-ID: <17985897.52.1345661635908.JavaMail.coral@shine> From lofaolain at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-23 12:45:15: Film too thin. Process pressure low during run Message-ID: <26307243.82.1345751115678.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-08-23 13:50:02: PRESSURE CONTROL NOT WORKING Message-ID: <27146884.84.1345755003288.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-08-24 07:25:58: phosphine cylinder change Message-ID: <22803287.104.1345818359170.JavaMail.coral@shine> phosphine cylinder change From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-08-23 13:50:02: PRESSURE CONTROL NOT WORKING Message-ID: <28128159.117.1345826453140.JavaMail.coral@shine> Resolved Pressure control issues From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-24 10:25:38: running poly test Message-ID: <22925740.126.1345829138894.JavaMail.coral@shine> Ted resolved pressure control Running thickness test From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-08-22 11:53:55: Will need test after coat Message-ID: <13667476.162.1345841642944.JavaMail.coral@shine> Ran P580POLY 00:23:30 expected ~925A Actually 770A Thin...process pressure was 198mtor (set point 200mtor) From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-24 10:25:38: running poly test Message-ID: <18723172.163.1345841651962.JavaMail.coral@shine> Ran P580POLY 00:23:30 expected ~925A Actually 770A Thin...process pressure was 198mtor (set point 200mtor) From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-23 12:45:15: Film too thin. Process pressure low during run Message-ID: <20662596.164.1345841663001.JavaMail.coral@shine> Ran P580POLY 00:23:30 expected ~925A Actually 770A Thin...process pressure was 198mtor (set point 200mtor) From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-08-24 13:54:56: Qual test thinner that expected Message-ID: <12592605.165.1345841697081.JavaMail.coral@shine> Ran P580POLY 00:23:30 expected ~925A Actually 770A Thin...process pressure was 198mtor (set point 200mtor) From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-08-24 07:25:58: phosphine cylinder change Message-ID: <22541663.6.1346074042881.JavaMail.coral@shine> cylinder changed and leak checked back on line From zfyu at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: zfyu at snf.stanford.edu (zfyu at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-27 17:24:21: broken tweezer Message-ID: <1606050.28.1346113462681.JavaMail.coral@shine> I drop the vacuum tweezer and broke its quartz head. sorry about the inconvenicence that I caused. From seymour at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-08-27 17:24:21: broken tweezer Message-ID: <31218329.34.1346165674585.JavaMail.coral@shine> replaced vac wand tip From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-08-24 13:54:56: Qual test thinner that expected Message-ID: <23142099.6.1347646085067.JavaMail.coral@shine> Refer to logbook for current growth rate From bchui at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-09-15 01:01:41: barely passing leak check Message-ID: <25893357.27.1347696101528.JavaMail.coral@shine> 55-60 mT From bchui at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-09-15 13:58:22: Getting worse and worse during leakcheck Message-ID: <18394199.28.1347742703005.JavaMail.coral@shine> 3 days ago it was 55mT, yesterday it was 60, today it's 63 From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-09-25 07:52:51: badger interlock installed and tested Message-ID: <19505022.2.1348584771997.JavaMail.coral@shine> badger interlock installed and tested From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-10-09 02:04:32: TGO system in fault Message-ID: <3776476.14.1349773473057.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-10-09 02:04:32: TGO system in fault Message-ID: <15856458.2.1349790810198.JavaMail.coral@shine> TGO CL96 is functional again From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-10-17 16:04:44: Silane alarm in fault Message-ID: <22082006.11.1350515085657.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Shutdown thermcopoly1 SNF 2012-10-17 16:04:44: Silane alarm in fault Message-ID: <21484144.50.1350660968740.JavaMail.coral@shine> Calcon FS has inspected sensor and found it functioning as normal. We will continue to monitor this sensor. From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-10-23 11:44:36: Cleaned burnbox-back up Message-ID: <603.40.1351017876736.JavaMail.coral@shine> Cleaned burnbox-back up From lindaw at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-10-31 14:33:08: pump pressure reading seems high Message-ID: <19805656.124.1351719188560.JavaMail.coral@shine> during base and leak, and now during temp stab of p580poly program the pump pressure reading 1198. at temp stab the tube and aux reading 230, which is normal. Also, the thermco nitride in standby shows the pump reading 1198, while tube reading 479. Aux is -1? thermcopoly went through base and leak check ok, but it just seems that the pump pressure is reading too high. Is this a new normal, or have i lost my mind completely? From lindaw at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-10-31 16:42:25: pump pressure readout high Message-ID: <688004.133.1351726946240.JavaMail.coral@shine> Throughout recipe P580POLY and STBYPOLY, the reading at the monitor for the pump pressure remained at 1196 mT. Usually during pump, base pressure, and such, the pump pressure comes down with the tube and Aux pressures as read on the monitor. My wafers visually look ok. during STBYPOLY base pressure, the readings were Tube =9mT, Pump = 1196 mT, Aux = 29 mT. During leak check, Tube = 45mT, Pump = 1196mT, Aux = 54mT. Could it be a bad pressure sensor? From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Problem thermcopoly1 SNF 2012-10-31 16:42:25: pump pressure readout high Message-ID: <21184360.138.1351780693104.JavaMail.coral@shine> Replaced tube manometer, reads OK now From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-10-31 14:33:08: pump pressure reading seems high Message-ID: <1194169.139.1351780701114.JavaMail.coral@shine> Replaced tube manometer, reads OK now From tberg at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-10-23 11:44:36: Cleaned burnbox-back up Message-ID: <1551129.140.1351780713133.JavaMail.coral@shine> From lindaw at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-11-19 13:05:11: rail with boats not centered in tube Message-ID: <10882329.6.1353359112627.JavaMail.coral@shine> I was watching the wafers load into Thermcopoly1 and noticed that the boat rail was very close to the left side of the tube as it entered the tube, but appeared to move back to just slightly left of center as the the boats completed loading. The rail seems to not be straight with relation to the tube. From seymour at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-11-20 09:07:07: adjusted loader to be more centered Message-ID: <31639999.3.1353431227126.JavaMail.coral@shine> From lindaw at snf.stanford.edu Sun Dec 23 09:26:08 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:26:08 -0000 Subject: Comment thermcopoly1 SNF 2012-12-06 15:22:04: film a tad more non-uniform than normal Message-ID: <28465436.1.1354836125327.JavaMail.coral@shine> wafers loaded closer to the source visually appear to be slightly more uniform than wafers closer to the load end of the furnace. Total wafers 13 + 2 dummies on either side, loaded from the back of the middle boat on the rail (wide slots). Where the wafers near the source end have a normal looking 1 fringe of color change, the wafers near the source end have two distinct color fringes. Fringes on all wafers tend to be larger at the top of the wafers as loaded (flats up). Did not notice any temp or pressure fluctuations during deposition, but wasn't really looking for them.