Comment thermcopoly1 SNF 2012-08-23 12:45:15: Film too thin. Process pressure low during run

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Dec 23 09:26:08 PST 2012


Ran P580POLY   00:23:30
expected ~925A
Actually 770A
Thin...process pressure was 198mtor (set point 200mtor)



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