Problem thermcopoly1 SNF 2012-10-31 16:42:25: pump pressure readout high

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sun Dec 23 09:26:08 PST 2012


Throughout recipe P580POLY  and STBYPOLY, the reading at the monitor for the pump pressure remained at 1196 mT.  Usually during pump, base pressure, and such, the pump pressure comes down with the tube and Aux pressures as read on the monitor.  My wafers visually look ok.
during STBYPOLY base pressure, the readings were Tube =9mT, Pump = 1196 mT, Aux = 29 mT.  During leak check, Tube = 45mT, Pump = 1196mT, Aux = 54mT.  
Could it be a bad pressure sensor?



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