From mtang at snf.stanford.edu  Sat Jun 23 14:21:21 2012
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Sat, 23 Jun 2012 14:21:21 -0700
Subject: Shutdown thermcopoly1 SNF 2012-06-23 14:21:21: No Silane based process gas
Message-ID: <mailman.829.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Silane gas cabinets are shut down due to fire detection problem.



From tberg at snf.stanford.edu  Mon Jun 25 10:57:17 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 25 Jun 2012 10:57:17 -0700
Subject: Shutdown thermcopoly1 SNF 2012-06-23 14:21:21: No Silane based process gas
Message-ID: <mailman.830.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Silane back on