From jaehlee at snf.stanford.edu  Fri Mar  2 15:28:58 2012
From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu)
Date: Fri, 2 Mar 2012 15:28:58 -0800
Subject: Comment thermcopoly1 SNF 2012-03-02 15:28:58: sapphire wafers in the rear boat
Message-ID: <mailman.815.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

I am trying to deposit  a thick layer of polysilicon, so please leave my wafer inside the tube. thanks! 



From jaehlee at snf.stanford.edu  Sat Mar  3 10:21:09 2012
From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu)
Date: Sat, 3 Mar 2012 10:21:09 -0800
Subject: Comment thermcopoly1 SNF 2012-03-03 10:21:08: aborted sapphire process for now
Message-ID: <mailman.816.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Among 8 sapphire wafers, 4 wafers broke after the boat out. It seems that slow cooling is required due to thermal expansion mismatch. 
thanks!



From maurice at snf.stanford.edu  Wed Mar 14 15:28:24 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 14 Mar 2012 15:28:24 -0700
Subject: Shutdown thermcopoly1 SNF 2012-03-14 15:28:23: Not venting
Message-ID: <mailman.817.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

No N2 flow in backfill step
Tried running POLYOUT...same problem



From tberg at snf.stanford.edu  Thu Mar 15 09:35:29 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 15 Mar 2012 09:35:29 -0700
Subject: Shutdown thermcopoly1 SNF 2012-03-14 15:28:23: Not venting
Message-ID: <mailman.818.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

found circuit breaker off affecting n2. Turned back on now it is vented and flowing fine. Wafers removed and system back in standby.



From tberg at snf.stanford.edu  Fri Mar 16 05:56:04 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 16 Mar 2012 05:56:04 -0700
Subject: Shutdown thermcopoly1 SNF 2012-03-16 05:56:03: facilities tie ins
Message-ID: <mailman.819.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Mar 16 10:54:59 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 16 Mar 2012 10:54:59 -0700
Subject: Shutdown thermcopoly1 SNF 2012-03-16 05:56:03: facilities tie ins
Message-ID: <mailman.820.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

completed



From tberg at snf.stanford.edu  Tue Mar 27 06:07:35 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 27 Mar 2012 06:07:35 -0700
Subject: Problem thermcopoly1 SNF 2012-03-27 06:07:34: no B2H6
Message-ID: <mailman.821.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Bad regulator in gas cab



From maurice at snf.stanford.edu  Tue Mar 27 09:57:29 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 27 Mar 2012 09:57:29 -0700
Subject: Comment thermcopoly1 SNF 2012-03-27 09:57:28: 134.05 um
Message-ID: <mailman.822.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>




From daesung at snf.stanford.edu  Fri Mar 30 15:57:15 2012
From: daesung at snf.stanford.edu (daesung at snf.stanford.edu)
Date: Fri, 30 Mar 2012 15:57:15 -0700
Subject: Problem thermcopoly1 SNF 2012-03-30 15:57:14: Leakfail
Message-ID: <mailman.823.1356283575.4877.thermcopoly1-pcs@snf.stanford.edu>

Some boat recalibration is required