Comment thermcopoly1 SNF 2012-03-02 15:28:58: sapphire wafers in the rear boat

jaehlee at snf.stanford.edu jaehlee at snf.stanford.edu
Fri Mar 2 15:28:58 PST 2012


I am trying to deposit  a thick layer of polysilicon, so please leave my wafer inside the tube. thanks! 




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