From chienyuc at stanford.edu  Fri Jan 25 23:26:30 2013
From: chienyuc at stanford.edu (chienyuc at stanford.edu)
Date: Fri, 25 Jan 2013 23:26:30 -0800 (PST)
Subject: [thermcopoly1-pcs] Problem thermcopoly1 SNF 2013-01-25 23:26:30: no
	SiH4 flow
Message-ID: <3018187.19.1359185190980.JavaMail.coral@snc-coraldb.stanford.edu>

Ran P580POLY but no SiH4 flow during DEP phase.  No poly Si deposited.

From tberg at stanford.edu  Mon Jan 28 06:32:10 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Mon, 28 Jan 2013 06:32:10 -0800 (PST)
Subject: [thermcopoly1-pcs] Problem thermcopoly1 SNF 2013-01-25
	23:26:30: no SiH4 flow
Message-ID: <32444810.27.1359383530532.JavaMail.coral@snc-coraldb.stanford.edu>

Reset silane gas panel and autocrossover