From maurice at stanford.edu  Wed Nov 15 09:27:35 2006
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 15 Nov 2006 09:27:35 -0800
Subject: thermcopoly status
Message-ID: <455B4E07.6060802@stanford.edu>

Thermco poly has an issue with satisfying interlocks that let the gases 
flow.  Ted and his crew are working on it (along with epi burn box, epi 
isolation valve, new AMAT mfc change, the TEL instillation...).  Thermco 
poly is not currently at the top of the priority list, but it will be 
addressed as soon as time allows.

We will update you when we have more information.

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at snf.stanford.edu  Mon Nov 20 11:49:54 2006
From: maurice at snf.stanford.edu (maurice)
Date: Mon, 20 Nov 2006 11:49:54 -0800
Subject: Thermco Poly up
Message-ID: <456206E2.2070308@snf.stanford.edu>


Ted replaced a chip in CVD interface board on Thermco poly and it is 
working.

have fun


-m